Capillary electrophoretic speciation of Cu(II) and Co(III) in the electroless copper plating baths

Summary A capillary electrophoretic method for the determination of Cu(II) and Co(III) chelates with ethylenediamine in electroless copper plating baths has been developed. The influence of carrier electrolyte parameters such as nature of counter-ion and pH were studied and discussed. The optimised separations were carried out in a fused silica capillary (57 cm × 75 μm I.D.) filled with an ethylenediamine sulfate electrolyte (20 mol L⁻¹ ethylendiamine, pH7.0 with H₂SO₄; applied voltage, +25 kV) using direct UV detection at 214 nm. The detection limits for a signalto-noise ratio of 3 and 10s hydrodynamic injection were 5×10⁻⁶ mol L⁻¹ for Cu(II) and 1×10⁻⁶ mol L⁻¹ for Co(III). The relative standard deviations of the peak areas for Cu(II) and Co(III) were found to be 1.5% and 2.4%, respectively, with five consecutive injections of standard solution containing 5×10⁻⁵ mol L⁻¹ of each metal ion. Application of the method to the speciation of Cu(II) and Co(III) complexes in copper plating bath samples is also demonstrated.