Spray method: Dependence of deposition efficiency on substrate temperature

Application of the spray method for the deposition of thin films has shown that the deposition efficiency is a decreasing function of the substrate temperature. The forces which determine the path and the time the droplets take to go from the nozzle to the substrate are analyzed. A theoretical curve of the deposition efficiency as a function of the substrate temperature has been obtained by a successive-approximation method. Experimental values of the efficiency obtained from the growth rate of the films are always a function of the substrate temperature. The good agreement of the theoretical curve with the experimental data confirms the validity of the method applied for our analysis.Work supported by Ministero della Universitá e della Ricerca Scientifica and Centro Regionale Ricerche Nucleari e Struttura della Materia