Plastic relaxation anisotropy in epitaxial films grown on miscut Si(001) substrates

A way of calculating the structural parameters of semiconductor epitaxial layers grown on miscut (0 0 1) substrates is developed. It is shown that the difference between the tensor of film elastic strains and the spherical tensor of strains translating the film’s crystal lattice into the substrate’s lattice is a tensor whose components are proportional to X-ray strains. The technique is used to analyze GaAs and Ge_0.2Si_0.8 films grown on (1 1 13) Si substrates. The anisotropy of the degree of plastic relaxation is established for lateral directions perpendicular and parallel to the interfacial steps in the GeSi film. It is proposed that noninteger Miller indices be used to denote the direction and value of the rotation of the film’s crystal lattice with respect to the substrate lattice.