An esca investigation of the low energy electron beam polymerisation of hexafluorobenzene

Irradiation of condensed hexafluorobenzene by low energy (2 keV) electrons is shown to result in the formation of thin films of involatile solids composed of carbon and fluorine. Cls ESCA spectra show that ₃, ₂, and type functional groups are present in the polymer produced, indicating that some rearrangement reactions have taken place.

A study of the dose rate dependence of the structure of the films has been undertaken, which indicates that under controlled conditions the films closely resemble films formed by plasma and ion beam polymerisation. Inferences are made as to the likely processes occurring in the electron beam polymerisation process.