| 氮气射频放电与直流放电PIC/MC模拟的比较 |
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| 引用本文： | 张连珠,赵海涛,孙倩,姚福保,杨巍. 氮气射频放电与直流放电PIC/MC模拟的比较[J]. 计算物理, 2012, 29(2): 227-233 |
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| 作者姓名： | 张连珠 赵海涛 孙倩 姚福保 杨巍 |
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| 作者单位： | 河北师范大学物理科学与信息工程学院, 石家庄 050024 |
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| 基金项目： | 河北省自然科学基金(A2006000123)资助项目 |
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| 摘 要： | 建立氮气容性射频等离子体过程的PIC/MC模型,将模拟结果与直流放电进行比较.结果表明:射频等离子体粒子(e,N2+,N+)的平均密度较直流放电约大-个量级,在射频电极附近粒子(e,N2+,N+)的平均能量比直流放电阴极附近的能量低3倍左右;密度偏低的原子离子N+在两电极附近具较高的能量,能量较低的分子离子N2+在放电空间具较高密度,N2+的密度大约是N+的6倍;计算的电子能量几率分布与测量结果-致.
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| 关 键 词： | 氮气射频放电 PIC/MC模拟 N2等离子体 |
| 收稿时间： | 2011-06-26 |
| 修稿时间： | 2011-10-03 |
A Comparison of Radio-frequency and Direc Current Discharge in Nitrogen with PIC/MC Model |
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| ZHANG Lianzhu , ZHAO Haitao , SUN Qian , YAO Fubao , YANG Wei. A Comparison of Radio-frequency and Direc Current Discharge in Nitrogen with PIC/MC Model[J]. Chinese Journal of Computational Physics, 2012, 29(2): 227-233 |
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| Authors: | ZHANG Lianzhu ZHAO Haitao SUN Qian YAO Fubao YANG Wei |
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| Affiliation: | College of Physics Science and Information Engineering, Hebei Normal University, Shijiazhuang 050024, China |
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| Abstract: | A PIC/MC model is developed for electrons,atomic ions N+ and molecular ions N+2 in a capacitively coupled rf glow discharge.Modeling results are compared with those in a dc glow discharge at similar conditions.It reveals that the mean densities of particles(e,N+2,N+) in rf discharge are nearly ten times greater than those in dc discharge,the mean energy near a rf electrode is about three times less than that near a cathode in dc discharge;the ions N+ have higher energy near two electrodes,the ions N+2 have higher density,and the density of N+2 is about six times the density of N+.The simulated electron energy probability distributions agree with measured results. |
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| Keywords: | nitrogen rf discharge particle-in-cell-Monte Carlo method nitrogen plasma |
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