Specific features of synthesis,chemical composition,and thermal stability of anodic borosilicate coatings on silicon |
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| Authors: | I. L. Baranov L. V. Tabulina L. S. Stanovaya T. G. Rusal’skaya Yu. A. Shostak |
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| Affiliation: | (1) Educational Institution, Belarussian State University of Informatics and Radioelectronics, Minsk, Belarus |
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| Abstract: | Thickness and resistivity of anodic borosilicate coatings synthesized on n-type silicon were studied in relation to the conditions in which the final forming potentials are reached and to the content of boric acid in an ethylene glycol solution. A method for synthesis of the coatings for use in nanoelectronics was suggested on the basis of data on the thermal stability of their chemical composition. |
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