| 碲镉汞液相外延石墨舟的温度场均匀性改善 |
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| 引用本文： | 陆骏,李东升,木胜,万志远,朱辉,薄俊祥,杨岸,黄元晋,王志斌.碲镉汞液相外延石墨舟的温度场均匀性改善[J].红外技术,2019,41(4):299-304. |
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| 作者姓名： | 陆骏 李东升 木胜 万志远 朱辉 薄俊祥 杨岸 黄元晋 王志斌 |
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| 作者单位： | 昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223;昆明物理研究所,云南昆明,650223 |
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| 基金项目： | 国家重点基础研究发展计划（973计划） |
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| 摘 要： | 对碲镉汞液相外延(Liquid phase epitaxy, LPE)石墨舟进行了数值模拟,计算了石墨舟温度场分布。通过在母液周围加入石英框,分析其对温度场的影响,得到了石英框壁厚与温度分布的关系。模拟发现,在母液周围加入石英框结构,可以提高外延生长界面温度场均匀性。最后,将分析结果与实验相结合,进行实验验证,成功降低了边界效应对碲镉汞薄膜的影响,外延生长出厚度极差??为1.4?m、组分极差?x不超过0.002的长波碲镉汞薄膜。
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| 关 键 词： | 石墨舟 温度场均匀性 碲镉汞 LPE |
Improvement of Temperature Uniformity of Graphite Slider Boat for LPE Growth of HgCdTe Films |
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| LU Jun,LI Dongsheng,MU Sheng,WAN Zhiyuan,ZHU Hui,BO Junxiang,YANG An,HUANG Yuanjin,WANG Zhibin.Improvement of Temperature Uniformity of Graphite Slider Boat for LPE Growth of HgCdTe Films[J].Infrared Technology,2019,41(4):299-304. |
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| Authors: | LU Jun LI Dongsheng MU Sheng WAN Zhiyuan ZHU Hui BO Junxiang YANG An HUANG Yuanjin WANG Zhibin |
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| Institution: | (Kunming Institute of Physics,Kunming 650223,China) |
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| Abstract: | A graphite slider boat for LPE(Liquid phase epitaxy)growth of HgCdTe films was simulated numerically in this study.The temperature distributions of the growth interface were calculated,and their features were discussed.By varying the size of the quartz capsule,the effects of a heat field were investigated.The results show that in order to obtain high uniformity of the HgCdTe films,the quartz capsule is placed in the graphite slider boat and used to increase temperature uniformity of the growth interface.Combining the simulation and experimental results,the boundary effect of the LPE was reduced.The LWIR film made of HgCdTe,whose thicknessΔδis approximately 1.4μm and composition rangeΔx is less than 0.002,is successfully obtained. |
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| Keywords: | graphite slider boat temperature uniformity cadmium mercury tellurium LPE |
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