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AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计
引用本文:陆敏,方慧智,张国义.AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计[J].半导体学报,2004,25(5).
作者姓名:陆敏  方慧智  张国义
作者单位:北京大学人工微结构和介观物理国家重点实验室,北京大学宽禁带半导体研究中心,北京,100871
基金项目:国家自然科学基金,国家高技术研究发展计划(863计划)
摘    要:采用一维传递矩阵法模拟计算了AlGaN/GaN/InGaN对称分别限制多量子阱激光器(发射波长为396.6nm)的波导特性.以光限制因子、阈值电流密度和功率效率作为优化参量,获得激光器的优化结构参数为:3周期量子阱In0.02Ga0.98N/In0.15Ga0.85N(10.5nm/3.5nm)作为有源层,90nm In0.1Ga0.9N为波导层,120周期Al0.25Ga0.75N/GaN(2.5nm/2.5nm)为限制层.

关 键 词:AlGaN/GaN/InGaN  MQW  SCH

Optimized Layers Design for AlGaN/GaN/InGaN Symmetrical Separate Confinement Heterojunction Multi-Quantum Well Laser Diode
Lu Min,Fang Huizhi,ZHANG Guoyi.Optimized Layers Design for AlGaN/GaN/InGaN Symmetrical Separate Confinement Heterojunction Multi-Quantum Well Laser Diode[J].Chinese Journal of Semiconductors,2004,25(5).
Authors:Lu Min  Fang Huizhi  ZHANG Guoyi
Abstract:Waveguide characteristics of symmetrical separate confinement heterojunction multi-quantum well (SCH-MQW) AlGaN/GaN/InGaN laser diode (LD) are studied by using one dimensional (1-D) transfer-matrix waveguide approach.Aiming at photon confinement factor,threshold current,and power efficiency,layers design for SCH-MQW LD is optimized.The optimal layers parameters are 3 periods In0.02Ga0.98N/In0.15Ga0.85N QW for active layer,In0.1Ga0.9N for waveguide layer with 90nm thick,and 120×(2.5nm/2.5nm) Al0.25Ga0.75N/GaN supper lattices for cladding layer with the laser wavelength of 396.6nm.
Keywords:AlGaN/GaN/InGaN  MQW  SCH
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