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Low voltage TEM: Influences on electron energy loss spectrometry experiments
Authors:M. St?ger-Pollach
Affiliation:1. Department of Industrial and System Engineering, State Key Laboratory of Ultra-precision Machining Technology, The Hong Kong Polytechnic University, Hong Kong, China;2. Department of Physics, Faculty of Science, University of Kragujevac, Kragujevac, Serbia;3. Faculty of Technical Sciences, University of Novi Sad, Novi Sad, Serbia;4. Blackett Laboratory, Imperial College London, South Kensington, London SW72AZ, UK;1. Nion R&D, 11511 NE 118th St, Kirkland, WA 98034, USA;2. Department of Physics, Arizona State University, Tempe, AZ 85287, USA;3. Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Abstract:We discuss the advantages and disadvantages of electron energy loss spectrometry (EELS) a transmission electron microscope (TEM) at different high tensions. Instrumental effects such as energy resolution, spatial resolution, and point spread function of the detecting system, as well as physical effects like inelastic (Coloumb) delocalization and Cerenkov losses are dealt with. It is found that the actually available equipment is suitable for performing low voltage experiments. The energy resolution of a thermo-ionic emitter can be tremendously improved at lower energies, and the detector also has advantageous behaviour.
Keywords:
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