| 反应等离子体中尘埃空洞形成的实验研究 |
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| 引用本文： | 吴静,张鹏云,宋巧丽,张家良,王德真.反应等离子体中尘埃空洞形成的实验研究[J].物理学报,2005,54(10):4794-4798. |
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| 作者姓名： | 吴静 张鹏云 宋巧丽 张家良 王德真 |
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| 作者单位： | 大连理工大学物理系，三束材料改性国家重点实验室，大连 116024 |
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| 基金项目： | 国家自然科学基金(批准号：10275010)资助的课题. |
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| 摘 要： | 利用气体合成（乙烯和硅烷，氩气是载气）的方法，产生尘埃粒子，并在此基础上研究了悬 浮在射频等离子体鞘层上方的尘埃云及尘埃空洞.实验结果给出了尘埃云和尘埃空洞与射频 功率和气压等参数的关系曲线.
关键词：
尘埃等离子体
尘埃空洞
尘埃云
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| 关 键 词： | 尘埃等离子体 尘埃空洞 尘埃云 |
| 文章编号： | 1000-3290/2005/54（10）/4794-05 |
| 收稿时间： | 01 27 2005 12:00AM |
| 修稿时间： | 2005-01-272005-03-14 |
Investigation of void in dust clouds in reactive plasma |
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| Wu Jing,Zhang Peng-Yun,Song Qiao-Li,Zhang Jia-Liang,Wang De-Zhen.Investigation of void in dust clouds in reactive plasma[J].Acta Physica Sinica,2005,54(10):4794-4798. |
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| Authors: | Wu Jing Zhang Peng-Yun Song Qiao-Li Zhang Jia-Liang Wang De-Zhen |
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| Institution: | State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Department of Physics, Dalian University of Technology, Dalian 116024, China |
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| Abstract: | The void in the sheath of a radio-frequency(rf) dusty plasma is investigated experimentally. Dust particles in our experiment are created in situ using mixed reactive gases silane and ethane. Dust particles in radio frequency discharges form crystalline structure and display instabilities under certain conditions. The behaviour of the dust void as a function of rf power and gas pressure is studied. |
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| Keywords: | dust plasma dust void dust clouds |
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