Analysis of the formation and evolution of oriented microstructures on laser ablated silicon |
| |
Authors: | J?C?Conde P?González F?Lusqui?os B?León |
| |
Institution: | (1) Dpto. Física Aplicada, University of Vigo, Lagoas-Marcosende, 36310 Vigo, Spain |
| |
Abstract: | A theoretical approach and qualitative analysis of the changes induced on the surface morphology and the formation of microstructures
on silicon targets irradiated by excimer laser are presented. This study is based on theoretical principles of the laser ablation
process, in particular, on the analysis of the contribution of the laser energy density, which involves the laser beam parameters
and also the physical properties of the target material. For different laser incident angles, the formation of micro-columns
oriented towards the laser incident direction is explained. Moreover, numerical simulations and ablation experiments carried
out with an excimer laser corroborate the theoretical analysis. |
| |
Keywords: | PACS" target="_blank">PACS 79 20 Dc 42 25 Lc 81 40 Gh 02 70 Dc |
本文献已被 SpringerLink 等数据库收录! |
|