溶胶-凝胶法制备PZT薄膜研究进展

随着微机电系统(MEMS)产业的快速发展,铁电薄膜材料作为微机电器件的重要组成部分而愈受重视。锆钛酸铅(PZT)薄膜具有优越的压电性、热释电性及光电性等性能,在微电子、压电、光学及半导体等领域展现了巨大的应用潜力。因此,高性能PZT薄膜的制备技术及制备工艺一直备受关注。其中,溶胶凝胶法因具有易于控制成分,所需设备成本低及制备薄膜的均匀性好等优点而被广泛用于PZT薄膜制作中。该文在溶胶凝胶法基本原理及制作工艺的基础上,着重分析了溶胶凝胶法制备PZT薄膜的研究现状,总结了当前溶胶凝胶法的技术特点,并指出了研究中存在的不足及未来的潜在改进方向。

Research Progress of PZT Thin Films Fabricated by SolGel Method

With the rapid development of microelectromechanicalsystem (MEMS) industry, the ferroelectric thin films, as an important part of MEMS devices, have attracted more and more attention. The lead zirconate titanate (PZT) thin films have shown great potential to be applied in microelectronics, piezoelectric industry, optics, semiconductors and other fields due to their excellent piezoelectricity, pyroelectricity and photoelectricity. Therefore, the fabrication technologies of high performance PZT thin films have always attracted much attention. Among them, the Sol-Gel method is widely used in the preparation of PZT films because of its advantages of easy control of the composition, low equipment cost and good uniformity. In this paper, based on the brief introduction to the principles and fabrication methods of the Sol-Gel method, the research status of PZT thin films prepared by Sol-Gel method is emphatically analyzed. The technical characteristics of the Sol-Gel method are summarized, and the shortcomings in the existing research as well as the potential improvements in the future are pointed out.