Structure and electrical resistance of thin scandium films (III). Study on electrical properties

The specific resistance-thickness of ScH_x (vacuum 10⁻⁵ to 5 · 10⁻⁶ Torr) and Sc films (vacuum 1 · 10⁻⁸ to 3 · 10⁻⁸ Torr) relationships have been obtained by keeping a record of a film resistance directly in the course of condensation. The results are discussed according to the theory FUCHS -SONDHEIMER (ScH_x, Sc) and MAYADAS -SHATZKES (Sc) assuming a diffuse scattering of the carriers (P = 0) on the external surface of the films. A mean free path of the current carriers is 188 to 355 Å (T ⋍ 300 K) for ScH_x and 400 Å with grain-boundary scattering parameter from 0.1 to 0.3 for Sc. The temperature dependence of specific resistivity of Sc films was obtained in the interval from 300 to 650 K during the annealing in vacuum 5 · 10⁻⁹ Torr.