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电镜样品的激光镀膜技术
引用本文:汪霖. 电镜样品的激光镀膜技术[J]. 浙江大学学报(理学版), 1998, 25(2): 54-57
作者姓名:汪霖
作者单位:杭州大学中心实验室
基金项目:该项目为省测试基金资助课题
摘    要:非导电的样品用扫描电镜进行观测时需要对样品进行镀膜处理以获得清晰的图像, 本文介绍应用脉冲激光沉积(PLD)技术对非导电样品的表面进行镀膜处理的方法和实验装置及实验结果.

关 键 词:脉冲激光沉积(PLD)  石墨靶  镀膜  

A Technology for Plating Carbon Film on Electron Microscopy Sample Surface by Pules Laser
Wang Lin Wu Jianzhong Du Jinchao Zhang Huiming. A Technology for Plating Carbon Film on Electron Microscopy Sample Surface by Pules Laser[J]. Journal of Zhejiang University(Sciences Edition), 1998, 25(2): 54-57
Authors:Wang Lin Wu Jianzhong Du Jinchao Zhang Huiming
Affiliation:(Center Lab.of Hang zhou University , Hangzhou 310028)
Abstract:A nonconducted sample is observed clearly by electron microscorpy, the sample have to be plated a conducted film. In this paper, the technology of pulesed laser diposition (PLD) to plate a carbon film on Electron Microscopy Sample surface is proposed, then the experimant device is discribed and the experiment results are discussed.
Keywords:pulesed laser diposition  graphite target  preparation of a film
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