| 透射式GaAs光阴极的静电键合粘结 |
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| 引用本文： | 高斐,郭晖,胡仓陆,向世明,石峰,彭岔霞,冯驰,徐晓兵.透射式GaAs光阴极的静电键合粘结[J].光子学报,2008,37(8):1549-1552. |
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| 作者姓名： | 高斐 郭晖 胡仓陆 向世明 石峰 彭岔霞 冯驰 徐晓兵 |
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| 作者单位： | 1. 西安应用光学研究所,微光夜视技术国防科技重点实验室,西安,710065;陕西师范大学,物理学与信息技术学院,西安,710062
2. 西安应用光学研究所,微光夜视技术国防科技重点实验室,西安,710065 |
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| 摘 要： | 提出了用于GaAs光阴极粘结的静电键合方法.相比于传统的热粘结方法,该方法温度低（350℃）,时间短（5 min）,在空气中进行.所制得的GaAs光阴极在激活台内的峰值灵敏度为68.8 mA/W（峰值波长为830 nm）.以此制作的三代微光管的积分灵敏度为1 311 μA/lm,优于传统的热粘结工艺制作的微光管的灵敏度(～1 200 μA/lm).
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| 关 键 词： | 微光像增强器 GaAs光阴极 静电键合 灵敏度 |
| 收稿时间： | 2007-03-22 |
| 修稿时间： | 2007-06-06 |
Electrostatic Bonding of GaAs Photocathode Materials to Glass |
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| GAO Fei,GUO Hui,HU Cang-lu,XIANG Shi-ming,SHI Feng,PENG Cha-xia,FENG Chi,XU Xiao-bing.Electrostatic Bonding of GaAs Photocathode Materials to Glass[J].Acta Photonica Sinica,2008,37(8):1549-1552. |
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| Authors: | GAO Fei GUO Hui HU Cang-lu XIANG Shi-ming SHI Feng PENG Cha-xia FENG Chi XU Xiao-bing |
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| Abstract: | Electrostatic bonding method is proposed to combine GaAs photocathode materials and glass.Compared with traditional thermal bonding,this method has the advantages of lower temperature(350℃),shorter time (5 min),and can be performed in air.The peak sensitivity of the fabricated transmission-mode GaAs photocathode using the electrostatic bonding method is 69mA/W at 830nm in active chamber.The integral sensitivity of the fabricated third generation GaAs image tube is 1 311 μA/lm,which is larger than that of the image tube fabricated by traditional thermal bonding (~1 200 μA/lm). |
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| Keywords: | Image intensifier GaAs photocathode Electrostatic bonding Sensitivity |
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