静态傅里叶变换红外光谱仪的公差分析

由于光谱分辨率或光谱信噪比只能作为光谱仪干涉系统的性能评价指标,但不能用于光学系统的公差分析与优化,所以将系统分为三个子系统:前置光学系统、干涉系统与后置光学系统,分别采用不同的评价标准分析系统公差。前置光学系统采用波像差为评价标准,给出波像差与光谱噪声的关系,分析误差对波像差的影响,间接给出各种误差对系统性能的影响。干涉系统直接采用光谱噪声作为评价标准,可直接给出各种误差对系统性能的影响。后置光学系统采用光斑尺寸作为评价标准。通过这种方法,计算出三个子系统的灵敏度矩阵,并且给出了前置光学系统与后置光学系统的公差分配。

Tolerance Analysis for a Static Fourier-Transform Infrared Spectrometer Based on Multi-Micro Mirrors

The spectral noises or spectral resolution is the main criterion for spectrometer, but it is not suitable for tolerance analysis and optical optimization. Therefore, the system is divided into three sub-systems: the front optical system, the interferometer and the post optical system, and three different criterions are taken separately. Wavefront errors is taken as criterion by the front optical system, and then the relationship between wavefront errors and spectral noises is analysed. If the changes in wavefront errors by the manufacturing and alignment errors are calculated, the influence on system performance could also be evaluated. Spectral noises can be taken as criterion by the interferometer, and the changes in system performance is evaluated directly. The spot diameter is taken as the criterion by the post optical system. Through this way, the sensitivity for three sub-systems and the tolerance tables on the front and post optical systems are listed.