| An Investigation of Three-Dimensional Construction Methods in the Micromachining of Silicon Surfaces with an Ultraviolet Laser |
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| 作者单位： | Department of Mechanical Engineering，Chubu University，Aichi 487-8501，Japan |
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| 摘 要： | １ＩｎｔｒｏｄｕｃｔｉｏｎＲｅｃｅｎｔｄｅｖｅｌｏｐｍｅｎｔｓｉｎｍｉｃｒｏｏｐｔｉｃｓ，ｍｉｃｒｏｅｌｅｃｔｒｏｎｉｃｓａｎｄｍｉｃｒｏｍｅｃｈａｎｉｃｓｒｅｑｕｉｒｅｎｏｖｅｌａｎｄｕｎｉｑｕｅｐｒｏｄｕｃｔｉｏｎｔｅｃｈｎｏｌｏｇｉｅｓｔｏ...
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| 收稿时间： | 1998/3/27 |
An Investigation of Three Dimensional Construction Methods in the Micromachining of Silicon Surfaces with an Ultraviolet Laser |
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| HE Liming.An Investigation of Three-Dimensional Construction Methods in the Micromachining of Silicon Surfaces with an Ultraviolet Laser[J].中国激光(英文版),1998,7(5):439-444. |
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| Authors: | HE Liming |
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| Abstract: | A method for point to point micromachining of three dimensional structures with a focused ultraviolet laser beam is presented. The technique for three dimensional micromachining is based on previous research on the machining of a unit shape. The number of pulses required to machine a three dimensional object is calculated. The object is machined on a Si (100) surface. Accuracy of the machined object is examined with a three dimensional profiler and the measurements are correlated with our model. The machining accuracy of the three dimensional object in the direction vertical to the surface is 0 041 nm/pulse. It is the same as the removal rate in a unit machined shape. |
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| Keywords: | micromachining ultraviolet laser three dimensional construction |
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