Study on the generalized thermoelastic vibration of the optically excited semiconducting microcantilevers |
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| Authors: | Yaqin Song Dragan M Todorovic Bernard Cretin Pascal Vairac |
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| Institution: | 1. MOE Key Laboratory for Strength and Vibration, School of Aerospace, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China;2. State Key Laboratory of Structural Analysis for Industrial Equipment, Dalian University of Technology, Dalian 116023, People’s Republic of China;3. Institute for multidisciplinary researches, University of Belgrade, K.Viseslava 1, 11030 Belgrade, Serbia;4. FEMTO-ST, Université de Franche-Comté, CNRS, ENSMM, UTBM, 32 Avenue de l’Observatoire, 25044 Besançon Cedex, France |
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| Abstract: | In this paper, the theory of coupled plasma, thermal and elastic wave was used to study the vibration of semiconducting microcantilevers during photothermal process. The generalized thermoelastic model was adopted, along with plasma wave model, to obtain the vibration response of semiconducting microcantilevers under periodical laser excitation. The influence of thermal relaxation time on the vibration was investigated. The conventional and generalized thermoelastic theories for the temperature and deflection of microcantilever were compared. The simulation results for the amplitude and phase versus the modulation frequency revealed that near resonance frequency the generalized hyperbolic thermoelastic model was more suitable to describe the vibration characterization of microcantilevers than the conventional thermoelstic model. |
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