单晶金刚石微杯形谐振子的激光刻蚀制造方法

基于激光刻蚀技术，提出了一种新型单晶金刚石微杯形谐振子的三维制造方法。由于高弹性模量、低热弹性阻尼以及较大的声波传递速度等优异的性质，单晶金刚石是一种理想的谐振子加工材料，但是金刚石硬度大且化学性能稳定，难以采用传统的加工方法成形加工。激光刻蚀因精度高，加工结构对称性好以及破损率低等特点，是一种较好的单晶金刚石加工方法。采用紫外激光加工机，研究了不同激光参数对单晶金刚石刻蚀质量的影响，通过合理设计微杯形谐振结构，规划激光刻蚀加工的轨迹，采用优化后激光刻蚀参数，实现了结构对称性较好的微杯形谐振子的加工，有望应用于高性能微杯形谐振陀螺。

Fabrication of single-crystal diamond micro-cupped resonators based on laser ablation

A novel 3-D fabrication process of micro-cupped resonators (MCR) using single-crystal diamond (SCD) is presented based on laser ablation. The high elastic modulus, low thermal elastic damping and large acoustic velocity of diamond make SCD an ideal material for micro and nanomechanical resonators. But diamond is difficult to shape for different application with the traditional machining method for its high hardness and chemical stability. Laser ablation is a better choice for higher accuracy, better structural symmetry, greater speed, and lower breakage rate. UV laser high precision processing machine has been employed for the ablation of SCD to study the effect of laser beam parameters on ablation quality. A better structure symmetry is acquired through optimized laser parameters, reasonably design of structure and trajectories of laser ablation so that the MCR has a potential advantage for micro-cupped gyroscope.