微米光栅加速度计的加工与性能研究

介绍了一种以微米衍射光栅为敏感元件的微机电加速度计敏感头的加工和性能。硅质量块底部加工有铝反射膜，透明玻璃基底上制作有金微米光栅，中间为空气腔，经硅玻璃阳极键合，构成敏感头的核心敏感部件。光源透过透明基底，照射在光栅上，在反射场内会产生一系列衍射级次，且各级次衍射光强与外界加速度之间呈函数关系。完成了微米光栅加速度计敏感头的加工，搭建了实验测试平台，完成了加速度计的灵敏度以及静电驱动性能测试。为未来新型集成式微米光栅加速度计设计和加工提供参考。

Fabrication and characterization of micro-grating accelerometer

The fabrication and characterization of a micro-grating accelerometer with optoelectronic read out is described. The sensor consists of an Al membrane at the bottom of the bulk silicon proof mass and a rigid Au grating on the transparent substrate respectively. Optical detection is performed by measuring the reflected diffraction orders when the grating is illuminated through the quartz. The diffraction-based optical accelerometer is fabricated with silicon-glass anodic bonding procedure. This process is employed extensively in MEMS for its simplification and robustness. Experiment results show that the acceleration sensor has a displacement sensitivity of about 8 mV/nm and an acceleration sensitivity of about 5.6g-1 V. These results provide the reference for design and fabrication of the novel integrated micro-grating accelerometer.