| 微透镜阵列误差对半导体激光匀化性能的影响 |
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| 引用本文： | 雷呈强, 汪岳峰, 殷智勇, 等. 微透镜阵列误差对半导体激光匀化性能的影响[J]. 强激光与粒子束, 2015, 27: 091002. doi: 10.11884/HPLPB201527.091002 |
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| 作者姓名： | 雷呈强 汪岳峰 殷智勇 尹韶云 孙秀辉 杜春雷 |
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| 作者单位： | 1.军械工程学院 电子与光学工程系, 河北 石家庄 050003;;;2.装备学院 航天指挥系, 北京 1 01 41 6;;;3.中国科学院 重庆绿色智能技术研究院 集成光电技术研究中心, 重庆 40071 4 |
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| 摘 要： | 为了减小微透镜阵列误差对匀化光斑的影响，深入研究微透镜阵列光束匀化系统中微透镜阵列相对位置误差对光束匀化性能的影响，设计了一种微透镜阵列光束匀化系统。依据相对位置误差类型的不同，将双列微透镜阵列间六个自由度变化导致的误差分为距离误差、偏移误差以及转动误差进行分析，并对每种误差对光束匀化性能的影响进行了研究。采用6板条条半导体激光器堆栈对上述匀化系统进行实验验证，实现了均匀性为90.75%的光斑，并对系统影响光斑性能的原因进行了分析。
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| 关 键 词： | 激光技术 微透镜阵列 位置误差 半导体激光 均匀光斑 |
| 收稿时间： | 2015-06-19 |
| 修稿时间： | 2015-07-06 |
Effects of microlens array positon error on diode laser beam homogenization |
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| Lei Chengqiang, Wang Yuefeng, Yin Zhiyong, et al. Effects of microlens array positon error on diode laser beam homogenization[J]. High Power Laser and Particle Beams, 2015, 27: 091002. doi: 10.11884/HPLPB201527.091002 |
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| Authors: | Lei Chengqiang Wang Yuefeng Yin Zhiyong Yin Shaoyun Sun Xiuhui Du Chunlei |
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| Affiliation: | 1. Department of Electronic and Optics Engineering,Ordnance Engineering College,Shijiazhuang 050003,China;;;2. Department of Space Command,Academy of Equipment,Beijing 101416,China;;;3. Integrated Optics and Electronic Centers,Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Chongqing 400714,China |
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| Abstract: | In order to minimize the effect of microlens array position error on homogenized spot, the influence of microlens array relative position error on diode laser beams homogenized spot is researched, and a laser diode beam homogenization system based on microlens array is designed. The position errors owning to the variation of six degrees of freedom between the two arrays are classified into distance error, offset error and rotation error, and the effects of the three kinds of position errors on beam homogenization are studied. The homogenization system is tested by a laser diode array consisting of 6 bars, a uniform pumped spot with 90.75% homogeneity is achieved, and the factors influencing the spot homogeneity are analyzed. |
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| Keywords: | laser technique microlens array position error laser diode homogenized spot |
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