电子束泵浦XeCl准分子激光器及应用

为了获得高能紫外激光输出,开展了电子束泵浦XeCl准分子激光技术研究。详细介绍了四向电子束泵浦准分子激光装置的工作原理和结构特征,简述Marx发生器的放电电压、放电电流,激光气室中的沉积能量,激光脉冲能量、脉宽等参数的测量方法；研究了电子束泵浦XeCl准分子激光输出特性,得到了激光脉冲能量随激光气室内混合气体气压变化的规律,当激光器的充电电压为81 kV时,获得了能量100 J、脉宽200 ns的XeCl准分子激光输出,其本征效率约为3.2%。并且开展了XeCl准分子激光辐照涂层材料力学特性研究,采用微型红外通光冲量探头测量不同条件下激光辐照涂层材料的冲量耦合系数,在常压空气环境中的冲量耦合系数约为8.3210-5 NW-1。

Electron-beam-pumped XeCl excimer laser and application

To obtain high energy ultraviolet laser pulse, the XeCl excimer laser pumped by electron-beam was studied. This paper describes the construction and the principle of the XeCl excimer laser with electron-beam pump source in detail. Experimental study on laser output characteristic of the XeCl excimer laser was carried out, and effects on pressure of mix gas in laser chamber on output energy were shown. The energy of the laser pulse of 200 ns duration at half-amplitude exceeded 100 J under conditions of 81 kV charge voltage of laser and a befitting composition of gas mixture at a total pressure of 200 kPa, and the laser efficiency, calculated relative to all the energy deposited in the active volume, was 3.2%. The experimental research on impulse coupling produced by XeCl excimer laser (308 nm) interaction with the coating layer was performed. Impulse coupling was measured by the subminiature impulse detector, and impulse coupling coefficient was calculated for different air pressure. The impulse coupling coefficient under ambient air, which was 8.3210-5 NW-1, was about twice that under vacuum condition.