Formation and evolution of nanostructures on semiconductor surfaces in the process of laser-induced inelastic deformation |
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| Authors: | V I Emel’yanov V B Zaitsev G S Plotnikov |
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| Institution: | (1) Physics Department, Lomonosov Moscow State University, Moscow, 119992, Russia |
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| Abstract: | A hierarchy of formed Ge surface relief nanostructures, including a disordered nanocluster structure, a two-dimensional lattice, and a one-dimensional lattice, is observed as the laser irradiation dose is increased. It is described in the framework of the defect deformation mechanism. |
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