Microcantilevers as gas‐phase sensing platforms: Simplification and optimization of the production of polymer coated porous‐silicon‐over‐silicon microcantilevers |
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| Authors: | Shai Meltzman Ariel Shemesh Sara Stolyarova Yael Nemirovsky Yoav Eichen |
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| Institution: | 1. Schulich Faculty of Chemistry, Technion—Israel Institute of Technology, , Technion City, 3200008 Haifa, Israel;2. Department of Electrical Engineering, Technion—Israel Institute of Technology, , Technion City, 3200008 Haifa, Israel |
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| Abstract: | The asymmetric roughening of silicon microcantilevers using different vapor stain‐etching conditions is studied with the aim of optimizing face selective coating of microcantilevers by polymers through simple dipping. The effect of roughening is studied by following the time‐dependent guest‐induced bending of silicone microcantilevers coated with a poly‐4‐vinylpyridine sensing layer. A correlation between the surface roughness of the microcantilevers and their time‐dependent guest‐induced bending is gained from combining high resolution scanning electron microscopy studies of the surface of the microcantilevers as well as their cross‐sections with time‐dependent guest‐induced microcantilever bending. The purpose of the present work is to lay the foundations for a small and relatively simple gas‐phase sensing tool based on a microcantilever platform capable of offering wide range sensing capabilities. © 2013 Wiley Periodicals, 2014 , 52, 141–146 |
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| Keywords: | microcantilevers polymer coating chemo‐mechanics vapor stain‐etching sensing |
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