基于硅基电磁式MEMS扬声器的制作分析

近几年我国电子产品处于飞速发展状态,手机、平板等产品已经得到较为广泛的普及,因此扬声器的需求也就越来越高。每年手机制造业对于扬声器的需求就已经高达数亿只,进而越来越多的扬声器研究团队投入到提高扬声器音质方面。本文将系统分析基于硅基电磁式MEMS微扬声器的原理,并提出相应的制作方式以供参考。

Fabrication and Analysis of Electromagnetic MEMS Loudspeaker Based on Silicon

In recent years, our country's electronic products are in a state of rapid development, mobile phones, tablets and other products have been more widely popularized, so the demand for loudspeakers is also growing. Every year, the demand for loudspeakers in the mobile phone industry has reached hundreds of millions, and more and more speaker research teams are devoting themselves to improving the sound quality of loudspeakers. In this paper, the principle of silicon-based electromagnetic micro-loudspeaker is systematically analyzed, and the corresponding fabrication methods are proposed for reference.