| 辉光放电质谱技术应用进展 |
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| 引用本文： | 程肖玲,杭纬,黄本立. 辉光放电质谱技术应用进展[J]. 中国科学:化学, 2014, 0(5): 10-15 |
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| 作者姓名： | 程肖玲 杭纬 黄本立 |
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| 作者单位： | 谱学分析与仪器教育部重点实验室、厦门大学化学化工学院,厦门361005 |
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| 基金项目： | 国家自然科学基金(21074001);国家基础科学人才培养基金项目(J1310024)资助 |
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| 摘 要： | 对辉光放电质谱(GDMS)在金属与半导体、非导体、薄层与深度分析、分子信息分析方面的应用和一些新装置、新方法进行了综述.着重介绍了近20年来我国学者在辉光放电质谱方面的成就,并结合国际上的报道对该领域的发展现状进行了总结.
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| 关 键 词： | 辉光放电 质谱 应用 |
Applications of glow discharge mass spectrometry |
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| CHENG XiaoLing,HANG Wei,HUANG BenLi. Applications of glow discharge mass spectrometry[J]. Scientia Sinica Chimica, 2014, 0(5): 10-15 |
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| Authors: | CHENG XiaoLing HANG Wei HUANG BenLi |
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| Affiliation: | (The MOE Key Laboratory of Spectrochemical Analysis and Instruementation; College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China) |
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| Abstract: | Giving insight into the superior performance of glow discharge mass spectrometry （GDMS）, a wide variety of applications using this technique, such as metal, semiconductor, nonconductor, depth profiling and molecular information analysis are attracting great interests. In this article, these applications are reviewed. Some new devices and new methods are also introduced. Emphasis is put on the Chinese scholars＇ achievements in recent 20 years. Besides, the developments of GDMS have been summarized and prospected. |
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| Keywords: | glow discharge mass spectrometry application |
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