Abstract: | In this paper, the structure of a top-face-sway electromagnetic micromotor and its principle, fabrication andperformance are introduced. A combination of the electromagnetic actuating and the planetary reducingprovides this micromotor an advantage of low rotational speed and high torque. In addition, since a flexiblecoupling absorbs the sway and only outputs rotation, it gives this micromotor a balanced output. Thedimension of the micromotor is 5 mm. Its rotation speed has a range of 20 - 860 rpm, and its drivingcurrent is 300 mA. The output torque of the micromotor is measured to be 13.0 μNm. |