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Determination of Inorganic Fluorine in High-Purity Silane |
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| Authors: | V. A. Krylov E. A. Tikhonova O. Yu. Chernova V. V. Balabanov N. V. Kuleshova |
| Affiliation: | (1) Department of Chemistry, Nizhni Novgorod State University, pr, Gagarina 23, Nizhni Novgorod, 603600, Russia;(2) Institute of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, Nizhni Novgorod, 603600, Russia |
| Abstract: | A method was proposed for determining inorganic fluorine in high-purity silane. The method is based on the hydrolytic extraction of fluorine as fluorides to the aqueous phase, followed by the analysis of the extract by ion chromatography with a conductometric detector. The detection limit for inorganic fluorine was 1 × 10–5mass %. |
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