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Electrical characterization of ZnO,including analysis of surface conductivity
Authors:O. Schmidt  P. Kiesel  D. Ehrentraut  T. Fukuda  N.M. Johnson
Affiliation:(1) Palo Alto Research Center Inc., 3333 Coyote Hill Road, Palo Alto, CA 94304, USA;(2) Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
Abstract:Most current device applications of ZnO are hampered by the lack of control over the electrical conductivity. As-grown ZnO usually exhibits n-type conductivity, and the cause of this residual doping is heavily debated. We have performed temperature-dependent Hall measurements and material characterization by secondary ion mass spectroscopy on nominally undoped bulk ZnO crystals as well as on material doped with potential candidates for p-conductivity in order to explore the cause of the background doping and to study the impact of possible candidates for p-doping of ZnO. Also, this paper gives an overview about surface conductivity of high-resistivity ZnO bulk material and discusses how this property might impact the difficult search for p-type ZnO. We will demonstrate the effect of a surface conducting channel on homoepitaxial MgZnO layers grown by liquid-phase epitaxy. The detectability of such a surface layer on an epi sample indicates the high structural quality and low background doping of the layer. PACS 61.72.Vv; 68.49.Sf; 73.25.+i; 74.62.Dh; 81.15.Lm
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