一种同时测量平行偏差、倾斜偏差的方法

提出了一种仅由接收物镜和CCD构成的接收器,通过物镜位置的调整,可以同时完成平行偏差（平偏）和倾斜偏差（角偏）这两个参量的测量.通过对系统像差的分析,提出了可显著降低物镜像差对测量结果影响的算法.理论和实验数据表明,对于平偏测量范围为±10 mm、角偏测量范围为±2°、接收物镜焦距为50 mm、CCD尺寸为1/1.6 inch的系统,平偏测量准确度可达0.02 mm,角偏测量准确度可达9.5″.

Coaxiality Method for Position and Angle Deviation Measurement

A new type of laser beam-spot receiver system is provided,which was comprised of two units (receiver lens and CCD).In this system,not only position deviation but also angle deviation can be measured by changing the lens′ location.A calculation method,which could obviously minish the error induced by the lens′ optical aberration,was brought forward.Theoretical and experimental data indicate that,for a system whose position measurement range is ±10 mm,angle measurement range is ±2°,the lens′ focal length is 50 mm,and the CCD′s size is 1/1.6 inch,the position measurement accuracy is 0.02 mm and the angle measurement accuracy is 9.5″.