| 20keV钛离子注入植物种子深度浓度分布的模拟计算 |
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| 引用本文： | 王林香,祝恒江,郭常新,王世亨.20keV钛离子注入植物种子深度浓度分布的模拟计算[J].原子与分子物理学报,2011,28(1). |
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| 作者姓名： | 王林香 祝恒江 郭常新 王世亨 |
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| 作者单位： | 新疆师范大学,新疆师范大学,中国科学技术大学,新疆大学物理系 |
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| 基金项目： | 高等学校优秀青年教师教学、科研奖励基金 |
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| 摘 要： | 通过创建植物种子靶材料模型和修正的LSS（纵向静态稳定性）理论，使用Monte Carlo方法，提出了一种离子注入植物种子近似计算方法，使用该方法计算了20keV钛离子分别注入花生种子和彩棉种子的深度浓度分布。同时将该计算结果，TRIM程序计算结果，高斯拟合结果分别与实验测量结果进行了比较，本工作获得的计算结果更加接近实验值，并分析讨论了计算和实验结果差异的一些原因。
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| 关 键 词： | 离子注入 TRIM 程序 LSS 理论 Monte Carlo方法 深度浓度分布 |
Simulation of depth-concentration distribution for 20keV titanium ions implanted into seed |
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| WANG Lin-Xiang,ZHU Heng-Jiang,GUO Chang-Xin and WANG Shi-Heng.Simulation of depth-concentration distribution for 20keV titanium ions implanted into seed[J].Journal of Atomic and Molecular Physics,2011,28(1). |
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| Authors: | WANG Lin-Xiang ZHU Heng-Jiang GUO Chang-Xin and WANG Shi-Heng |
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| Institution: | Physics Department of Xinjiang Normal University,Physics Department of Xinjiang Normal University,Physics Department of University of Science and Technology of China,Physics Department of Xinjiang University |
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| Abstract: | A computational model for seed material was established according to the feature of seed using Monte Carlo method. Through revised LSS (longitudinal static stability) theory, a calculation method was proposed to simulate and calculate the depth-concentration distributions for 20keV titanium ions implanted into peanut seed and color cotton seed respectively. Compared with computational results of TRIM program and the results of Gaussian fitting, the results of this work were most matched with experiment results. |
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| Keywords: | Ion implantation TRIM program LSS theory Monte Carlo method depth-concentration distribution |
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