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Compositional origin of surface roughness variations in air-annealed ZnO single crystals
Authors:D Elizabeth Pugel  RD Vispute  T Venkatesan
Institution:a Department of Physics, University of Maryland, College Park, MD 20742, United States
b Department of Materials Science and Engineering, University of Maryland, College Park, MD 20742, United States
c Office of Electronic Miniaturization, University of Alaska - Fairbanks, Fairbanks, AK 99701, United States
Abstract:We directly investigated the chemical compositional origin of surface roughness variations in air-annealed ZnO single crystal samples for annealing temperatures up to 1000 °C. Atomic Force Microscopy (AFM) showed temperature-dependent changes in surface roughness and morphology, with a maximum in surface roughness of 2 nm found for samples annealed at 400 °C. The O(1s) line, measured by X-ray Photoelectron Spectroscopy (XPS) showed a maximum for Zn(OH)2 and a minimum for off-stoichiometric ZnO at 400 °C; while the Zn(2p) peaks show an increase in slope at that temperature. These results indicate that the roughness arises from Zn diffusion and loss of surface oxygen.
Keywords:ZnO  Single crystal  Surface morphology  Air-annealing
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