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基于MEMS的智能集成汽车传感器的研究
引用本文:吕良,邓中亮,刘玉德,连美霞.基于MEMS的智能集成汽车传感器的研究[J].北京工商大学学报(自然科学版),2007,25(4):18-22.
作者姓名:吕良  邓中亮  刘玉德  连美霞
作者单位:1. 北京邮电大学,自动化学院,北京,100876;北京工商大学,机械自动化学院,北京,100037
2. 北京邮电大学,自动化学院,北京,100876
3. 北京工商大学,机械自动化学院,北京,100037
4. 机械工程信息研究院,北京,100037
基金项目:北京市教委科技发展计划
摘    要:随着汽车传感器的迅速发展和MEMS技术的深入研究,基于MEMS技术的汽车传感器具有广阔的应用前景.本文从传感器原理、MEMS技术理论与制造工艺、智能传感器理论与控制算法、软件与硬件实现、以及集成原理与工艺等几个方面,综合运用MEMS技术、人工智能、信息融合、半导体加工等先进技术,研究基于MEMS技术的智能集成汽车传感器问题.最后对MEMS汽车传感器今后的发展研究进行了探讨.

关 键 词:汽车传感器  MEMS技术  智能传感器系统
文章编号:1671-1513(2007)04-0018-05
收稿时间:2007-04-16

RESEARCH OF INTELLIGENT INTEGRATED AUTOMOTIVE SENSOR SYSTEM BASED ON MEMS
L Liang,DENG Zhong-liang,LIU Yu-de,LIAN Mei-xia.RESEARCH OF INTELLIGENT INTEGRATED AUTOMOTIVE SENSOR SYSTEM BASED ON MEMS[J].Journal of Beijing Technology and Business University:Natural Science Edition,2007,25(4):18-22.
Authors:L Liang  DENG Zhong-liang  LIU Yu-de  LIAN Mei-xia
Institution:1. College of Automation, Beijing University of Posts and Telecommunications, Beijing 100876, China ; 2. College of Mechanical Engineering and Automation, Beijing Technology and Business University, Beijing 100037, China ; 3. China Machinery Industry Information Institute, Beijing 100037, China
Abstract:Along with rapid development of the automotive sensors and the farther research of MEMS technology,the automotive sensors based on MEMS have extensive applied foreground.This paper introduces the present application and the design of the MEMS intelligent sensor system in automotive.The principle of intelligent sensor,the realization of software and hardware,and the arithmetic of control are discussed.Through using MEMS technology,artificial intelligence,and information fusion,the Intelligent Integrated Automotive Sensor System Based on MEMS are researched.In the end the future research on the MEMS automotive sensor is pointed out.
Keywords:automotive sensors  MEMS technology  intelligent sensor system
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