| 半导体器件工艺中热电偶可靠性测温 |
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| 引用本文： | 周应华,宋才猷. 半导体器件工艺中热电偶可靠性测温[J]. 半导体光电, 1989, 0(3) |
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| 作者姓名： | 周应华 宋才猷 |
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| 作者单位： | 重庆光电技术研究所，重庆光电技术研究所 |
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| 摘 要： | 本文介绍了半导体器件工艺中利用热电偶测温的原理、性能以及如何对热电偶误差进行修正补偿。
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| 关 键 词： | 半导体工艺 温度测量 热电偶 |
Reliable Temperature Measurement with Thermocouple in Semiconductor device Process |
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| Zhou Yinghua and Song CaiyouChongqing Optoelectronics Research Institute. Reliable Temperature Measurement with Thermocouple in Semiconductor device Process[J]. Semiconductor Optoelectronics, 1989, 0(3) |
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| Authors: | Zhou Yinghua and Song CaiyouChongqing Optoelectronics Research Institute |
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| Affiliation: | Zhou Yinghua and Song CaiyouChongqing Optoelectronics Research Institute |
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| Abstract: | The principle and performancc of measuring temperature with ther- mocouple are described,and a method of cotrection for error in measuring tempera- ture is given as well. |
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| Keywords: | Scmiconductor Device Process Temperature Measurement.Themocoaple |
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