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XPS investigations on boron nitride fibre coatings prepared by chemical vapour deposition in comparison to their hydrolytic rate
Authors:D Dietrich  S Stöckel  G Marx
Institution:(1) Technical University Chemnitz, Physikalische Chemie, D-09107 Chemnitz, Germany, DE
Abstract:Investigations on CVD boron nitride films on fibres by means of photoelectron and X-ray spectroscopy resulted in B/N ratios above the stoichiometric value 1 and oxygen contents up to 25 at%. Compared to the hydrolytic rate of the films an apparent dependence was found on the deposition rate and some evidence of the oxygen concentration. CVD fibre coatings exhibit a hexagonal turbostratic structure with extremely small atomic layer plane dimensions, which was proved by transmission electron microscopy. Corresponding to oxygen concentrations in pyrolytic carbon films with similar structure a model is proposed, where the small atomic layers with dimensions of some nanometers cause a relatively high oxygen concentration in the boron nitride films. The oxygen atoms saturate the dangling bonds. Moreover the B/N ratio extents the expected stoichiometric ratio due to the oxygen atoms at nitrogen sites. Received: 15 July 1997 / Revised: 29 January 1998 / Accepted: 2 February 1998
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