XPS investigations on boron nitride fibre coatings prepared by chemical vapour deposition in comparison to their hydrolytic rate |
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Authors: | D Dietrich S Stöckel G Marx |
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Institution: | (1) Technical University Chemnitz, Physikalische Chemie, D-09107 Chemnitz, Germany, DE |
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Abstract: | Investigations on CVD boron nitride films on fibres by means of photoelectron and X-ray spectroscopy resulted in B/N ratios
above the stoichiometric value 1 and oxygen contents up to 25 at%. Compared to the hydrolytic rate of the films an apparent
dependence was found on the deposition rate and some evidence of the oxygen concentration. CVD fibre coatings exhibit a hexagonal
turbostratic structure with extremely small atomic layer plane dimensions, which was proved by transmission electron microscopy.
Corresponding to oxygen concentrations in pyrolytic carbon films with similar structure a model is proposed, where the small
atomic layers with dimensions of some nanometers cause a relatively high oxygen concentration in the boron nitride films.
The oxygen atoms saturate the dangling bonds. Moreover the B/N ratio extents the expected stoichiometric ratio due to the
oxygen atoms at nitrogen sites.
Received: 15 July 1997 / Revised: 29 January 1998 / Accepted: 2 February 1998 |
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