多层衬底、高Tc超导薄膜热敏红外探测器的热导研究

本文提出在高T_c超导薄膜平面热敏红外探测器中光辐照引起超导膜上呈高斯分布温升的模型。在此模型基础上,导出了计算衬底热导的基本方程。它不仅能适用于单层平面型衬底的热导计算,而且适用于串联结构多层平面型衬底的热导计算。计算结果与文献7]的结果相一致,也与文献1]的实测值符合,具有较大的普适性。应用Math CAD程序,得出了衬底热导G₃与光照半径r、衬底厚度d和频率f三者间的相互关系,从而为选择最佳结构或工艺参数创造了条件,指明了提高探测器响应率、比探测率等和降低等效噪声功率的途径。 关键词：

INVESTIGATION OF THERMAL CONDUCTANCE ON BOLOMETRIC INFRARED DETECTOR OF HI GH Tc SUPERCONDUCTING FILM GROWN ON MULTILAYER SUBSTRATE

In this paper, we set up the model of Gaussian distribution on the temperature of illuminated superconducting film and derive a serial formula, from which the equation of the substrate thermal conductance G₃= 2πk_s· d · y(a(t),b(t),r) can be obtained. It can be used not only for G of single-layer substrate, but also for G of multi-layer substrate. The calculated results are in good agreement with the experimental ones.Using Maths CAD programm, the relations between illumination radius r, substrate thickness d or frequency f and G₃ could be obtained. Based on the above, the optimized structure or art parameters of the detector can be selected and some effective methods for improving its properties will be considered.