Generation of three-dimensional free-standing metal micro-objects by Laser Chemical processing

Three-dimensional free-standing metal micro-objects were created using Laser Chemical Vapor Deposition (LCVD) of aluminum from aluminum-trihydride-trimethylamine. A dense grid of thin lines (about 10 µm diameter) was deposited on a pre-formed polycarbonate substrate. The substrate was removed by dissolving it in a suitable solvent after ablating an unsoluble by-product by UV excimer laser pulses. The result is a free-standing three-dimensional aluminum grid micro-structure.