Mass redistribution causes the structural richness of ion-irradiated surfaces |
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Authors: | Madi Charbel S Anzenberg Eitan Ludwig Karl F Aziz Michael J |
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Institution: | Harvard School of Engineering and Applied Sciences, Cambridge Massachusetts 02138, USA. |
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Abstract: | We show that the "sputter patterning" topographical instability is determined by the effects of ion impact-induced prompt atomic redistribution and that erosion--the consensus predominant cause--is essentially irrelevant. We use grazing incidence small angle x-ray scattering to measure in situ the damping of noise or its amplification into patterns via the linear dispersion relation. A model based on the effects of impact-induced redistribution of those atoms that are not sputtered away explains both the observed ultrasmoothening at low angles from normal incidence and the instability at higher angles. |
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