An Improved On-Wafer Measurement Method for PHEMT Modeling for Millimeter Wave Application |
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| Authors: | Xiuping Li Jianjun Gao Choi Look Law Sheel Aditya and Georg Boeck |
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| Institution: | (1) Positioning and Wireless Technology Center, School of Electrical & Electronic Engineering, Nanyang Technological University, Singapore, 639798;(2) Institute for High-Frequency and Semiconductor System Technologies, Berlin University of Technology, Germany |
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| Abstract: | An improved on-wafer measurement method by using coaxial calibration instead of on-wafer calibration for PHEMT modeling is proposed in this paper. The advantage is that S-parameters of PHEMT device can be measured on wafer without impedance standard substrate (ISS) after the S-parameters of the microprobes have been determined. Excellent agreement is obtained between on-wafer calibration measurement and coaxial calibration measurements, respectively. |
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| Keywords: | On-wafer measurement coaxial calibration microprobe PHEMT modeling |
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