Wrinkle-Based Measurement of Elastic Modulus of Nano-Scale Thin Pt Film Deposited on Polymeric Substrate: Verification and Uncertainty Analysis |
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| Authors: | H-J. Choi J-H. Kim H-J. Lee S-A. Song H-J. Lee J-H. Han M-W. Moon |
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| Affiliation: | (1) Korea Institute of Machinery and Materials, 104 Sinseongno, Yuseong-gu, Daejeon, 305-343, Republic of Korea;(2) Korea Institute of Science and Technology, 39-1 Hawolgok-Dong, Seung-buk Gu, Seoul, 136-791, Republic of Korea; |
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| Abstract: | Wrinkle-based measurement of elastic modulus for a nano-scale thin film was analyzed. As a demonstrative example, the wrinkles of Pt films on a Polydimethylsiloxane (PDMS) substrate under compressive loading were formed with a well-defined wavelength, corresponding to the difference of elastic moduli between the films and substrates. The elastic modulus of the Pt nano-scale thin film measured with the wrinkle-based measurement was found to be consistent with that independently measured with micro-tensile test. Uncertainty of the wrinkle-based measurement was analyzed to figure out the main uncertainty components for the evaluation of elastic modulus measurement, and guidelines for the reliable wrinkle-based measurement were suggested. |
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