Wrinkle-Based Measurement of Elastic Modulus of Nano-Scale Thin Pt Film Deposited on Polymeric Substrate: Verification and Uncertainty Analysis |
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| Authors: | H-J Choi J-H Kim H-J Lee S-A Song H-J Lee J-H Han M-W Moon |
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| Institution: | (1) Korea Institute of Machinery and Materials, 104 Sinseongno, Yuseong-gu, Daejeon, 305-343, Republic of Korea;(2) Korea Institute of Science and Technology, 39-1 Hawolgok-Dong, Seung-buk Gu, Seoul, 136-791, Republic of Korea; |
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| Abstract: | Wrinkle-based measurement of elastic modulus for a nano-scale thin film was analyzed. As a demonstrative example, the wrinkles
of Pt films on a Polydimethylsiloxane (PDMS) substrate under compressive loading were formed with a well-defined wavelength,
corresponding to the difference of elastic moduli between the films and substrates. The elastic modulus of the Pt nano-scale
thin film measured with the wrinkle-based measurement was found to be consistent with that independently measured with micro-tensile
test. Uncertainty of the wrinkle-based measurement was analyzed to figure out the main uncertainty components for the evaluation
of elastic modulus measurement, and guidelines for the reliable wrinkle-based measurement were suggested. |
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