|
|||||
|
|
Evaluation of dislocation energy in thin films |
|
| Authors: | R.A. Coppeta D. Holec H. Ceric T. Grasser |
| Affiliation: | 1. Institute for Microelectronics, Technische Universit?t Wien, A-1040 Wien, Austria.coppeta@iue.tuwien.ac.at;3. Department of Physical Metallurgy and Materials Testing, Montanuniversit?t Leoben, A-8700 Leoben, Austria.;4. Christian Doppler Laboratory for Reliability Issues in Microelectronics at the Institute for Microelectronics, Technische Universit?t Wien, A-1040 Wien, Austria.;5. Institute for Microelectronics, Technische Universit?t Wien, A-1040 Wien, Austria. |
| Abstract: | |
| Keywords: | dislocations critical thickness heterostructure |