A novel multi‐detection technique for three‐dimensional reciprocal‐space mapping in grazing‐incidence X‐ray diffraction

A new scattering technique in grazing‐incidence X‐ray diffraction geometry is described which enables three‐dimensional mapping of reciprocal space by a single rocking scan of the sample. This is achieved by using a two‐dimensional detector. The new set‐up is discussed in terms of angular resolution and dynamic range of scattered intensity. As an example the diffuse scattering from a strained multilayer of self‐assembled (In,Ga)As quantum dots grown on GaAs substrate is presented.