Comparison of ODE methods for laminar reacting gas flow simulations |
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Authors: | S. van Veldhuizen C. Vuik C.R. Kleijn |
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Affiliation: | 1. Delft Institute of Applied Mathematics, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands;2. Department of Multi Scale Physics, Delft University of Technology, Prins Bernardlaan 6, 2628 BW Delft, The Netherlands |
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Abstract: | Two‐dimensional transient simulations are presented of the transport phenomena and multispecies, multireaction chemistry in chemical vapor deposition (CVD). The transient simulations are run until steady state, such that the steady state can be validated against the steady state solutions from literature. We compare various time integration methods in terms of efficiency and robustness. Besides stability, which is important due to the stiffness of the problem, preservation of non‐negativity is crucial. It appears that this latter condition on a time integration method is much more restrictive toward the time step size than stability. © 2007 Wiley Periodicals, Inc. Numer Methods Partial Differential Eq, 2008 |
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Keywords: | advection– diffusion– reaction equations chemical vapor deposition positivity time integration |
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