Soft X‐ray emission electron microscopy: chemical state microscopy from interface and bulk |
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| Authors: | A Zimina D R Batchelor S Eisebitt D Schmeisser A Shulakov W Eberhardt |
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| Institution: | 1. BESSY, 15 Albert Einstein Str, 12489 Berlin, Germany;2. Universit?t Wurzburg, Experimentelle Physik II, Am Hubland 97074, Germany;3. Lehrstuhl für Angewandte Physik, Sensorik, BTU Cottbus, Universit?tsplatz 3‐4, 03046 Cottbus, Germany;4. St Petersburg State University, Institute of Physics, St Petersburg 198904, Russia |
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| Abstract: | Scanning electron microscopy (SEM) has long been a workhorse of materials science and provides information on morphology, structure and elemental composition. However, information as to the chemical state of the elements is only available for deep lying core levels of the heavy elements and not the light elements. Whilst considerable advances have been made in high‐resolution wavelength dispersive spectroscopy (WDS) and energy dispersive spectroscopy (EDS), electron microscopy in the soft X‐ray region of ≈ 50–1500 eV is lacking. We present first results for a combined instrument of a soft X‐ray emission (SXE) spectrometer together with a spatially resolving (<100 nm) electron gun. Copyright © 2008 John Wiley & Sons, Ltd. |
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| Keywords: | SXE spectroscopy SEM fluorescence synchrotron soft X‐ray |
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