Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006—Surface chemical analysis—Auger electron spectroscopy and X‐ray photoelectron spectroscopy—Determination of lateral resolution

This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X‐ray photoelectron spectrometers under defined settings. The straight‐edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 µm. The grid method is suitable if the lateral resolution is expected to be less than 1 µm but more than 20 nm. The gold‐island method is suitable for instruments where the lateral resolution is expected to be less than 50 nm. The standard contains three informative annexes that provide illustrative examples of measurements of lateral resolution. Copyright © 2008 John Wiley & Sons, Ltd.