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High Stability and Uniformity Polymeric Thin-Film Transistor Arrays Fabricated by Directly Subtractive Photolithography
Authors:Yingtao Xie  Dongping Wang  Miao Li  Wei Cui  Lu Wang  Zhonghua Yan
Institution:1. Department of Electronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing, China;2. Department of Electronic Engineering, National Engineering Lab for TFT-LCD Key Materials and Technologies, Shanghai Jiao Tong University, Shanghai, China
Abstract:We prepared polymer thin film on a diffraction grating by electrochemical polymerization in cholesteric liquid crystal (ChLC). The polymer thin film synthesized in ChLC shows diffraction function due to periodic structure produced by imprinting of the matrix ChLC. Combination of diffractions from the substrate (prepared by top-down technique) and the polymer having fingerprint structure (prepared by bottom-up technique) provides double diffraction grating function.
Keywords:Large area  organic semiconductor  photolithography  polymer thin-film transistors array
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