On the use of elastic peak electron spectroscopy (EPES) to measure the H content of hydrogenated amorphous carbon films

Quasi‐elastic scattering of 1–2 keV electrons is considered with respect to measuring the H content in hydrogenated amorphous carbon (a‐C:H) materials. Interest in the technique lies in the fact that H cannot be typically detected by electron spectroscopic means (AES or XPS for instance). The feasibility of the approach is demonstrated and a quantification procedure is proposed. At the same time however, limitations of the technique (electron stimulated H desorption, low intensity of the H related signal and its spectral interference with the π‐plasmon peak) are discussed. Copyright © 2008 John Wiley & Sons, Ltd.