On the use of elastic peak electron spectroscopy (EPES) to measure the H content of hydrogenated amorphous carbon films |
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Authors: | M. Filippi L. Calliari |
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Affiliation: | Fondazione Bruno Kessler, Ricerca Scientifica e Tecnologica, 38100 Povo (Trento), Italy |
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Abstract: | Quasi‐elastic scattering of 1–2 keV electrons is considered with respect to measuring the H content in hydrogenated amorphous carbon (a‐C:H) materials. Interest in the technique lies in the fact that H cannot be typically detected by electron spectroscopic means (AES or XPS for instance). The feasibility of the approach is demonstrated and a quantification procedure is proposed. At the same time however, limitations of the technique (electron stimulated H desorption, low intensity of the H related signal and its spectral interference with the π‐plasmon peak) are discussed. Copyright © 2008 John Wiley & Sons, Ltd. |
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Keywords: | elastic peak electron spectroscopy hydrogen hydrogenated amorphous carbon electron stimulated desorption |
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