Detection Limits of Grazing-Exit EPMA for Particle Analysis |
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Authors: | Kouichi Tsuji Zoya Spolnik Kazuaki Wagatsuma Rik Nullens RenéE Van Grieken |
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Institution: | (1) Micro- and Trace Analysis Center, Department of Chemistry, University of Antwerp (UIA), B-2610 Antwerpen, Belgium, BE;(2) Institute for Materials Research, Tohoku University, Katahira-2-1-1, Aoba, Sendai, 980-8577, Japan, JP |
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Abstract: | In conventional electron probe microanalysis (EPMA), the electron-induced X-rays are measured at large take-off angles of
about 45°. In the grazing exit EPMA (GE-EPMA) method, they are measured at small angles (< 1°). X-rays emitted from deep positions
can not be detected at grazing exit angles due to refraction effects at sample-vacuum interface; therefore, it is possible
to measure X-rays emitted only from near the surface with a low background. GE-EPMA is especially suitable for the analysis
of particles deposited on a flat sample carrier. The detection limits of GE-EPMA were investigated for artificial particles
(Al2O3, Fe2O3 and PbO2 , particle sizes: 1 ∼ 18 μm) deposited on flat sample carriers of Au thin films–Si wafers. The detection limits improved
with decreasing exit angle. The detection limits for characteristic X-rays at an exit angle of approximately 1.1° were 2–4
times lower than at 45°. A minimum detection limit of ca. 0.1% was obtained for Al in small particles. |
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Keywords: | : Electron probe microanalysis grazing exit angle detection limit particles X-ray analysis |
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