Characterization of multilayers by means of EDXS in the analytical TEM |
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| Authors: | J. Thomas Reinhold Rennekamp Ludwig van Loyen |
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| Affiliation: | Institut für Festk?rper- und Werkstofforschung Dresden, Postfach 270016, D-01171 Dresden, Germany, DE
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| Abstract: | Referring to the characterization of nanoscale multilayers in cross section, the resolution limits of the EDXS method have been investigated. For that purpose EDXS line scan profiles of nanoscale Fe-Cr multilayers have been calculated assuming an increased specimen thickness and different tilts between electron beam and layer interface. The resolution limit seems to be greater than 2 nm layer thickness for regular multilayers. Experimentally a limit of 5 nm was reached. Received: 30 July 1997 / Accepted: 2 February 1998 |
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